All-good-point out ultraviolet lasers have been widely used in the fields of mechanical flaw detection, lithography, micromachining and medicine for the advantages of small volume, lengthy lifestyle, higher efficiency, superior beam high-quality, vast tuning and slender spectral line, etc. Using higher power in the vicinity of-infrared coherent gentle source as the basic frequency source based upon nonlinear tuning technological know-how, creating ultraviolet coherent radiation by multistage frequency conversion is thought to be a significant approach to establish the ultraviolet coherent light supply.
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We summarized The present advancement position on the large-energy DUV laser both of those with the wavelength of FHG of the one-μm laser and at 193 nm. The recent growth in the solid-state/fiber laser, and also the nonlinear optical crystals, prompts not just the average electric power but also the beam good quality (coherence) of your DUV lasers to an unparalleled level.
By way of example, the current concave OC could be replaced by a airplane mirror which could mitigate the power density within the surface of M1 and the diamond. Additionally, utilizing superior hurt threshold coatings for M1 and diamond would also improve the output electric power without any damages. Then, the NIR laser within the 2nd Stokes wavelength could possibly be substantial sufficient, together with its great beam excellent, to generate the final DUV laser at 193 nm by using a high common energy.
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On another side, the facility scaling on the NIR laser is an additional factor to raise the typical power of your 193-nm DUV laser. Due to deficiency of the higher-ability amplification Resolution of the NIR laser (one example is at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) might be applied to make a wavelength converter by shifting the wavelength from one μm to the desired check here wavelength and also getting relative greater electricity [21]. Recently, a diamond Raman laser showed its skill in achieving a higher electricity and also a superior conversion performance at the 1st Stokes of your one-μm laser [22,23], which suggests the possibility to generally be utilized while in the 193-nm DUV laser era due to its high Raman attain and huge frequency change.
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The beam profile proven in Figure 7b demonstrated a fantastic beam quality as among the merits of Raman laser, which would be helpful to create a 193-nm DUV laser with a high quality beam.
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